Determination of Plasma Parameters of a Low-Pressure VHF-CCP used for Sterilization
Marcel Fiebrandt  1, @  , Katharina Stapelmann  1, @  , Nikita Bibinov  1  , Peter Awakowicz  1, @  
1 : Institute for Electrical Engineering and Plasma Technology, Ruhr-University Bochum  (AEPT)
Universitätsstraße 150 44801 Bochum -  Allemagne
Subject : : Poster
Topics : Plasma based sterilization/decontamination
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