Determination of Plasma Parameters of a Low-Pressure VHF-CCP used for Sterilization
1 : Institute for Electrical Engineering and Plasma Technology, Ruhr-University Bochum
(AEPT)
Universitätsstraße 150
44801 Bochum -
Allemagne
| Subject : | : | Poster |
| Topics | : | Plasma based sterilization/decontamination |
| PDF version | : |  PDF version |
